Invitation to bid for ICP-RIE (Fluorine), ICP-RIE (Chlorine), and PECVD cleanroom equipment

📄Description

Texas State University seeks invitations for bid (IFB) on three (3) separate pieces of cleanroom equipment. These pieces of equipment must be manufactured and supported by a single supplier and designed to operate in a particle controlled environment (cleanroom). These pieces of equipment must enable the operator to precisely control chamber conditions such as pressure, electrical bias, gas flow, temperature, and sample positioning to etch (remove) or deposit (add) material from various substrates and thin films via chemical and/or physical processes.

🏷️Commodity Codes (NIGP)

49000-Laboratory Equipment, Accessories And Supplies: General Analytical And Research For Nuclear, Optical, And Physical;49043-Laboratory And Scientific Equipment And Supplies (Not Otherwise Classified);17500-Chemical Laboratory Equipment And Supplies;17553-Laboratory Equipment, General;